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Volumn 5, Issue 4, 2006, Pages
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Investigation of possible ArF resist slimming mechanisms
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Author keywords
193 nm resist; Blanket; Carbonyl; Exposure; Heating; Mechanism; SEM; Shrinkage
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Indexed keywords
ARGON;
CURING;
ELECTROMAGNETIC WAVES;
ELECTRON BEAMS;
HEATING;
SCANNING ELECTRON MICROSCOPY;
SHRINKAGE;
CARBONYL BONDS;
ELECTRON BEAM CURING;
ELECTRON EXPOSURE;
SLIMMING MECHANISMS;
PHOTORESISTS;
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EID: 33947104279
PISSN: 15371646
EISSN: None
Source Type: Journal
DOI: 10.1117/1.2399525 Document Type: Article |
Times cited : (5)
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References (6)
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