Development of a Piezoelectric Polymer-based Sensorized Microgripper for Microassembly and Micromanipulation

IEEE International Conference on Intelligent Robots and Systems

Volumn 2, Issue , 2003, Pages 1864-1869

  Kim, Deok Ho ^a   Kim, Byungkyu ^a   Kang, Hyunjae ^a   Ju, Byeong Kwon ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b NONE

Author keywords

Force sensing; Microassembly; Microgripper; Micromanipulation; Piezoelectric polymer; PVDF

Indexed keywords

FEEDBACK; MICROMANIPULATORS; OPTOELECTRONIC DEVICES; PIEZOELECTRIC MATERIALS; PLASTIC FILMS; POLYMERS; ROBOTIC ASSEMBLY; SENSORS;

FORCE SENSING; HYBRID MICROSYSTEMS;

GRIPPERS;

EID: 0346779032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. F. Arai, G. U. Lee, and R. J. Colton, "Integrated micro endeffector for micromanipulation," IEEE/ASME Transactions on Mechatronics, vol. 3, no. 1, pp.17-23, 1998.
2. M. F. Barsky, D. K. Lindner, and R. O. Claus, "Robot gripper control system using PVDF piezoelectric sensors," IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 36, no. 1, pp. 129-134, 1989.
3. J. Dargahi. M. Parameswaran, and S. payandeh, "A micromachined piezoelectric tactile sensor for an endoscopic grasper-theory, fabrication and experiments," Journal of Microelectromechanical Systems, vol. 9, no. 3, pp. 329-335, 2000.
4. C. K. M. Fung, I. Elhajj, W. J. Li, and N. Xi, "A 2-D PVDF force sensing system for micromanipulation and microassembly," Proceedings of IEEE International Conference on Robotics and Automation, Washington DC, USA, pp. 1489-1494, May, 2002.
5. M. Goldfarb and N. Celanovic "A flexure-based gripper for small-scale manipulation," Robotica, vol. 17, no. 2, pp.181-188, 1999.
6. C. J. Kim and A. P. Pisano, "Polysilicon microgripper," Senors and Actuators, A. vol. 33, pp. 221-227, 1992.
7. S.-M. Kim, K. Kim, J.-H. Shim, B. K. Kim, D.-H. Kim, and C.-C. Chung, "Position and force control of a sensorized microgripper," Proceedings of the 2002 International Conference on Control, Automation and System, pp. 319-322, Muju, Korea, October, 2002.
8. A. Menciassi, G. Scalari, A. Eisinberg, C. Anticoli, P. Francabandiera, M.C. Carrozza, and P. Dario, "An instrumented probe for mechanical characterization of soft tissues," Biomedical Microdevices, pp. 149-156, 2001.
9. B. J. Nelson, Y. Zhou, and B. Vikramaditya, "Sensor-based microassembly of hybrid MEMS devices," IEEE Control Systems, vol. 18, no. 6, pp. 35-45, 1998.
10. D. Popa, B. H. Kang, J. Sin, and J. Zou, "Reconfigurable micro-assembly system for photonics applications," Proceedings of IEEE International Conference on Robotics and Automation, Washington DC, USA, pp. 192-197, April, 2000.
11. D. Rossi, D. Lazzeri, L. Domenici, C. Nannini, and P. Basser, "Tactile sensing by an electromechanochemical skin," Sensors and Actuators, vol. 17, pp. 107-111, 1989.
12. M. Sitti, S. Horighuchi, and H. Hashimoto, "Tele-touch feedback of surface at the micro/nano scale: modeling and experiments," Proceedings of 1999 IEEE/RSJ International Conference Robotics and Systems, vol. 2, pp. 882-888, 1999.
13. T. Tanikawa and T. Arai, "Development of micro-manipulation system having a two-fingered micro-hand," IEEE Transactions on Robotics and Automation, vol. 15, no. 1, pp. 152-162, 1999.
14. W. Zesch, M. Brunner, and A. Weber "Vacuum tool for handling microobjects with a nanorobot," Proceedings of 1997 IEEE International Conference on Robotics and Automation, Monterey, USA, pp. 1761-1766, 1997.
15. Y. Zhou and B. J. Nelson, "The effect of material properties and gripping force on micrograsping," Proceedings of 2000 IEEE Conference on Robotics and Automation, pp.1115-1120, 2000.