Tunable optical bandpass filter with variable-aperture MEMS reflector

Journal of Lightwave Technology

Volumn 24, Issue 12, 2006, Pages 5095-5102

  Yu, kyoungsik ^a   Lee, Daesung ^b   Park, Namkyoo ^c   Solgaard, Olav ^b  

^a Seoul National University   (South Korea)

^b STANFORD UNIVERSITY   (United States)

^c Seoul National University   (South Korea)

Author keywords

Bandpass filters; Gratings; Microelectromechanical devices; Optical fiber communication; Optical filters; Tunable filters; Wavelength division multiplexing

Indexed keywords

BANDPASS FILTERS; DIFFRACTION GRATINGS; MEMS; MIRRORS; OPTICAL BAND GAPS; OPTICAL COMMUNICATION; SILICON ON INSULATOR TECHNOLOGY; WAVELENGTH DIVISION MULTIPLEXING;

COMBDRIVE ACTUATORS; DOUBLE-PASS MONOCHROMATOR; TUNABLE FILTERS;

OPTICAL FILTERS;

EID: 33847637962     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2006.884987     Document Type: Article

References (39)

1. A. H. Gnauck, S. Chandrasekhar, J. Leuthold, and L. Stulz, "Demonstration of 42.7-Gb/s DPSK receiver with 45 photons/bit sensitivity," IEEE Photon. Technol. Lett., vol. 15, no. 1, pp. 99-101, Jan. 2003.
2. I. Lyubomirsky and B. Pitchumani, "Impact of optical filtering on duobinary transmission," IEEE Photon. Technol. Lett., vol. 16, no. 8, pp. 1969-1971, Aug. 2004.
3. Y. K. Su, L. Moller, R. Ryf, C. J. Xie, and X. Liu, "Feasibility study of 0.8-b/s/Hz spectral efficiency at 160 Gb/s using phase-correlated RZ signals with vestigial sideband filtering," IEEE Photon. Technol. Lett., vol. 16, no. 5, pp. 1388-1390, May 2004.
4. M. Pfennigbauer, M. M. Strasser, M. Pauer, and P. J. Winzer, "Dependence of optically preamplified receiver sensitivity on optical and electrical filter bandwidths - Measurement and simulation," IEEE Photon. Technol. Lett., vol. 14, no. 6, pp. 831-833, Jun. 2002.
5. I. Lyubomirsky, S. Shetty, J. Roman, and M. Y. Frankel, "Optimum 10-Gb/s NRZ receiver bandwidths for ultradense WDM transmission systems," IEEE Photon. Technol. Lett., vol. 14, no. 6, pp. 870-872, Jun.2002.
6. L. Moller, J. H. Sinsky, H. Haunstein, S. Chandrasekhar, C. R. Doerr, L. Leuthold, C. A. Burrus, and L. L. Buhl, "Higher order PMD distortion mitigation based on optical narrow bandwidth signal filtering," IEEE Photon. Technol. Lett., vol. 14, no. 4, pp. 558-560, Apr. 2002.
7. I. C. M. Littler, M. Rochette, and B. J. Eggleton, "Adjustable bandwidth dispersionless bandpass FBG optical filter," Opt. Express, vol. 13, no. 9, pp. 3397-3407, May 2005.
8. D. O. Caplan and W. A. Atia, "A quantum-limited optically-matched communication link," in Proc. Opt. Fiber Commun. Conf., 2001, vol. 1, pp. MM2-1-MM2-3.
9. Y. Liu, E. Tangdiongga, Z. Li, S. Zhang, H. D. Waardt, G. D. Khoe, and H. J. S. Dorren, "Error-free all-optical wavelength conversion at 160 Gb/s using a semiconductor optical amplifier and an optical bandpass filter," J. Lightw. Technol., vol. 24, no. 1, pp. 230-236, Jan. 2006.
10. L. Domash, M. Wu, N. Nemchuk, and E. Ma, "Tunable and switchable multiple-cavity thin film filters," J. Lightw. Technol., vol. 22, no. 1, pp. 126-135, Jan. 2004.
11. E. Pawlowski, K. Takiguchi, M. Okuno, K. Sasayama, A. Himeno, K. Okamoto, and Y. Ohmori, "Variable bandwidth and tunable centre frequency filter using transversal-form programmable optical filter," Electron. Lett., vol. 32, no. 2, pp. 113-114, Jan. 1996.
12. K. Yu and O. Solgaard, "Tunable optical transversal filters based on a Gires-Tournois interferometer with MEMS phase shifters," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 588-597, May/Jun. 2004.
13. T. Zhou, D. O. Lopez, M. E. Simon, F. Pardo, V. A. Aksyuk, and D. T. Neilson, "MEMS-based 14 GHz resolution dynamic optical filter," Electron. Lett., vol. 39, no. 24, pp. 1744-1746, Nov. 2003.
14. D. T. Neilson, H. Tang, D. S. Greywall, N. R. Basavanhally, L. Ko, D. A. Ramsey, J. D. Weld, Y. L. Low, F. Pardo, D. O. Lopez, P. Busch, J. Prybyla, M. Haueis, C. S. Pai, R. Scotti, and R. Ryf, "Channel equalization and blocking filter utilizing microelectromechanical mirrors," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 563-569, May/Jun. 2004.
15. M. Knapczyk, A. Krishnan, L. G. De Peralta, A. A. Bernussi, and H. Temkin, "Reconfigurable optical filter based on digital mirror arrays," IEEE Photon. Technol. Lett., vol. 17, no. 8, pp. 1743-1745, Aug. 2005.
16. K. Yu, D. Lee, and O. Solgaard, "Variable bandwidth optical filters with vertical micromirrors and silicon optical bench alignment technology," in Proc. l7th Annu. Meeting IEEE LEOS, 2004, vol. 2, pp. 531-532.
17. K. Yu and N. Park, "Characterization of MEMS optical bandpass filters with narrow transition bands," in Proc. SPIE - Opt. Transmission, Switching, and Subsyst. III, Shanghai, China, 2005, vol. 6021, pp. 2R1-2R8.
18. G. Wilson, C. J. Chen, P. Gooding, and J. E. Ford, "Spectral filter with independently variable center wavelength and bandwidth," presented at the Eur. Conf. Optical Commum., Stockholm, Sweden, 2004, Postdeadline Paper Th4.2.1.
19. J. D. Berger, D. Anthon, S. Dutta, E Ilkov, and I. F. Wu, "Tunable MEMS devices for reconfigurable optical networks," in Proc. OFC, 2005, vol. 4, p. OThD1.
20. G. Lenz, B. J. Eggleton, C. R. Giles, C. K. Madsen, and R. E. Slusher, "Dispersive properties of optical filters for WDM systems," IEEE J. Quantum Electron., vol. 34, no. 8, pp. 1390-1402, Aug. 1998.
21. T. Sano, T. Iwashima, M. Katayama, T. Kanie, M. Harumoto, M. Shigehara, H. Suganuma, and M. Nishimura, "Novel multichannel tunable chromatic dispersion compensator based on MEMS and diffraction grating," IEEE Photon. Technol. Lett., vol. 15, no. 8, pp. 1109-1110, Aug. 2003.
22. D. T. Neilson, R. Ryf, F. Pardo, V. A. Aksyuk, M. E. Simon, D. O. Lopez, D. M. Marom, and S. Chandrasekhar, "MEMS-based channelized dispersion compensator with flat passbands," J. Lightw. Technol., vol. 22, no. 1, pp. 101-105, Jan. 2004.
23. K. R. Wildnauer and Z. Azary, "A double-pass monochromator for wavelength selection in an optical spectrum analyzer," Hewlett-Packard J., vol. 44, no. 6, pp. 68-74, 1993.
24. E. G. Loewen and E. Popov, Diffraction Gratings and Applications. New York: Marcel Dekker, 1997.
25. S. H. Oh and D. M. Marom, "Attenuation mechanism effect on filter shape in channelized dynamic spectral equalizers," Appl. Opt., vol. 43, no. 1, pp. 127-131, Jan. 2004.
26. D. M. Marom, D. T. Neilson, D. S. Greywall, C. S. Pai, N. R. Basavanhally, V. A. Aksyuk, D. O. Lopez, F. Pardo, M. E. Simon, Y. Low, P. Kolodner, and C. A. Bolle, "Wavelength-selective 1 x K switches using free-space optics and MEMS micromirrors: Theory, design, and implementation," J. Lightw. Technol., vol. 23, no. 4, pp. 1620-1630, Apr. 2005.
27. D. Lee, K. Yu, and O. Solgaard, "Vertical micromirror fabricated in (110) silicon device layer by combination of KOH and DRIE etch," in Proc. IEEE/LEOS Int. Conf. Optical MEMS, Takamatsu, Japan, 2004, pp.174-175.
28. W. Noell, P. A. Clerc, L. Dellmann, B. Guldimann, H. P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dandliker, and N. F. Derooij, "Applications of SOI-based optical MEMS," IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 1, pp. 148-154, Jan./Feb. 2002.
29. S. S. Yun and J. H. Lee, "A micromachined in-plane tunable optical filter using the thermo-optic effect of crystalline silicon," J. Micromech. Microeng., vol. 13, no. 5, pp. 721-725, Sep. 2003.
30. Y. Uenishi, M. Tsugai, and M. Mehregany, "Micro-opto-mechanical devices fabricated by anisotropic etching of (110) silicon," J. Micromech. Microeng., vol. 5, no. 4, pp. 305-312, Dec. 1995.
31. W. H. Juan and S. W. Pang, "High-aspect-ratio Si vertical micromirror arrays for optical switching," J. Microelectromech. Syst., vol. 7, no. 2, pp.207-213,Jun.1998.
32. K. Yu, D. Lee, U. Krishnamoorthy, N. Park, and O. Solgaard, "Micromachined Fourier transform spectrometer on silicon optical bench platform," Sens. Actuators A, Phys., vol. 130/131, pp. 523-530, 2006.
33. D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, "Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 505-513, May/Jun. 2004.
34. J. Li, A. Q. Liu, and Q. X. Zhang, "Tolerance analysis for comb-drive actuator using DRIE fabrication," Sens. Actuators A, Phys., vol. 125, no. 2, pp. 494-503, Jan. 2006.
35. W. J. Ye, S. Mukherjee, and N. C. Macdonald, "Optimal shape design of an electrostatic comb drive in microelectromechanical systems," J. Microelectromech. Syst., vol. 7, no. 1, pp. 16-26, Mar. 1998.
36. J. D. Grade, H. Jerman, and T. W. Kenny, "Design of large deflection electrostatic actuators," J. Microelectromech. Syst., vol. 12, no. 3, pp.335-343,Jun.2003.
37. Coming OptiFocus Collimating Lensed Fiber: Product Information, 2003.
38. S. Ryu, Y. Horiuchi, and K. Mochizuki, "Novel chromatic dispersion measurement method over continuous gigahertz tuning range," J. Lightw. Technol., vol. 7, no. 8, pp. 1177-1180, Aug. 1989.
39. X. Liu, L. F. Mollenauer, and X. Wei, "Impact of group-delay ripple in transmission systems including phase-modulated formats," IEEE Photon. Technol. Lett., vol. 16, no. 1, pp. 305-307, Jan. 2004.