Polarization modulation imaging ellipsometry for thin film thickness measurement

Optics Communications

Volumn 273, Issue 1, 2007, Pages 74-83

  Chou, Chien ^a,b   Teng, Hui Kang ^c   Yu, Chih Jen ^b   Huang, Hong Sheng ^b  

^a NATIONAL YANG MING UNIVERSITY   (Taiwan)

^b NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^c NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; FILM THICKNESS; LIGHT MODULATION; LIGHT POLARIZATION; PHOTOMETRY; THIN FILMS;

ELLIPSOMETRIC PARAMETERS; PHOTOMETRIC ELLIPSOMETRY; QUARTER WAVE PLATES (QWP);

ELLIPSOMETRY;

EID: 33847629879     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2006.12.032     Document Type: Article

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