Null ellipsometer with phase modulation

Optics Express

Volumn 12, Issue 24, 2004, Pages 6040-6045

  Postava, K ^a,b   Maziewski, A ^a   Yamaguchi, T ^c   Ossikovski, R ^d   Visnovsky S ^c   Pistora J ^b  

^a UNIVERSITY OF BIALYSTOK   (Poland)

^b VSB TECHNICAL UNIVERSITY OF OSTRAVA   (Czech Republic)

^c SHIZUOKA UNIVERSITY   (Japan)

^d LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; FREQUENCY MODULATION; LIGHT POLARIZATION; PHYSICAL OPTICS; POLARIMETERS; SIGNAL TO NOISE RATIO;

ELLIPSOMETRY AND POLARIMETRY; INSTRUMENTATION, MEASUREMENT AND METROLOGY; NULLING SYSTEMS; PHOTOELASTIC MODULATOR (PEM);

PHASE MODULATION;

EID: 10644250616     PISSN: 10944087     EISSN: None     Source Type: Journal    
DOI: 10.1364/OPEX.12.006040     Document Type: Article

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