Direct measurements of fracture toughness and crack growth in polysilicon MEMS

Materials Research Society Symposium Proceedings

Volumn 854, Issue , 2004, Pages 214-219

  Chasiotis, I ^a   Cho, S W ^b   Jonnalagadda, K ^a  

^a UNIVERSITY OF VIRGINIA   (United States)

^b University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRACK PROPAGATION; CRACK TIPS; FRACTURE TOUGHNESS; MECHANICAL VARIABLES MEASUREMENT; POLYSILICON; STRESS INTENSITY FACTORS;

ANISOTROPIC POLYCRYSTALLINE STRUCTURE; CRACK GROWTH MEASUREMENTS; CRACK TIP DISPLACEMENT; SHARP EDGE CRACKS;

MEMS;

EID: 34249883294     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-854-u10.6     Document Type: Conference Paper

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