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Volumn 5055, Issue , 2003, Pages 300-306
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Microvalve for SMA-based CHAD
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Author keywords
Compact Hybrid Actuator Device (CHAD); Finite element analysis (FEA); MEMS valve; Shape Memory Alloy (SMA)
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Indexed keywords
ACTUATORS;
FINITE ELEMENT METHOD;
MICROMACHINING;
SHAPE MEMORY EFFECT;
VALVES (MECHANICAL);
COMPACT HYBRID ACTUATOR DEVICE (CHAD);
MICROELECTROMECHANICAL DEVICES;
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EID: 0242720480
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.483593 Document Type: Conference Paper |
Times cited : (2)
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References (12)
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