A novel method of fabrication of microlens arrays

Infrared Physics and Technology

Volumn 44, Issue 2, 2003, Pages 133-135

  Chen, Sihai ^a   Yi, Xinjian ^a   Ma, Hong ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Diffraction efficiency; Diffractive microlens arrays; Self alignment

Indexed keywords

DIFFRACTION; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SILICA;

DIFFRACTION EFFICIENCY;

MICROLENSES;

EID: 0037376108     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(02)00191-3     Document Type: Article

References (4)

1. Chen S., Yi X., Linbin K.et al. Infrared Phys. Technol. 43:2002;109.
2. Chen S., Yi X., Li Y.et al. Proc. SPIE. 4224:2000;170.
3. Unno Y. Appl. Opt. 37:1998;3401.
4. Cox J.A., Werner T., Lee J.et al. Proc. SPIE. 1211:1990;116.