Investigation of microlens mold fabricated by focused ion beam technology

Microelectronic Engineering

Volumn 56, Issue 3-4, 2001, Pages 333-338

  Fu, Y ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

FIB milling; Hot embossing; Microlens mold; Replication

Indexed keywords

FABRICATION; INTERFEROMETERS; ION BEAMS; MILLING (MACHINING); MOLDS; SURFACE ROUGHNESS;

FOCUSED ION BEAM (FIB) MILLING; MICROLENS MOLD;

MICROLENSES;

EID: 0035422244     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(01)00570-6     Document Type: Article

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