Trapezoidal structure for residue-free filling and patterning

Journal of Physical Chemistry C

Volumn 111, Issue 3, 2007, Pages 1140-1145

  Kim, M Joon ^a   Song, Seokyong ^a   Kwon, S Joon ^b   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; COATINGS; CONTACT ANGLE; LITHOGRAPHY; MOLDS;

DIRECT TRANSFER; MICROCHANNELS; RESIDUE FREE FILLING; TRAPEZOIDAL STRUCTURE;

CHANNEL FLOW;

EID: 33847372447     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp0623342     Document Type: Article

References (17)

1. Jackman, R. J.; Duffy, D. C.; Ostuni, E.; Willmore, N. D.; Whitesides, G. M. Anal. Chem. 1998, 70, 2280-2287.
2. Lu, N.; Chen, X.; Molenda, D.; Naber, A.; Fuchs, H.; Talapin, D. V.; Weller, H.; Muller, J.; Lupton, J. M.; Feldmann, J.; Rogach, A. L.; Chi, L. Nano Lett. 2004, 4, 885-888.
3. Moran, P. M.; Lange, F. F. Appl. Phys. Lett. 1999, 74, 1332-1334.
4. Seemann, R.; Kramer, E. J.; Lange, F. F. New J. Phys. 2004, 6, 111.
5. Bao, L.-R.; Tan, L.; Huang, X. D.; Kong, Y. P.; Guo, L. J.; Pang, S. W.; Yee, A. F. J. Vac. Sci. Technol. B 2003, 21, 2749-2754.
6. Kong, Y. P.; Tan, L.; Pang, S. W.; Yee, A. F. J. Vac. Sci. Technol. A 2004, 22, 1873-1878.
7. Lee, H.; Jung, G.-Y. Microelectron. Eng. 2005, 77, 42-47.
8. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Appl. Phys. Lett. 1995, 67, 3114-3116.
9. Xia, Y. N.; Whitesides, G. M. Angew. Chem., Int. Ed. 1998, 37, 550-575.
10. Suh, K. Y.; Kim, Y. S.; Lee, H. H. Adv. Mater. 2001, 13, 1386-1389.
11. Kim, Y. S.; Suh, K. Y.; Lee, H. H. Appl. Phys. Lett. 2001, 79, 2285-2287.
12. Rhee, J. S.; Park, J. H.; Kwon, S. J.; Yoon, H. S.; Lee, H. H. Adv. Mater. 2003, 15, 1075-1078.
13. Brochard-Wyart, F.; Di Meglio, J.-M.; Quere, D.; De Gennes, P.-G. Langmuir 1991, 7, 335-338.
14. Adamson, A. W.; Gast, A. P. Physical Chemistry of Surfaces, 6th ed.; John Wiley & Sons, Inc.: New York, 1997; Chapter 2.
15. Concus, P.; Finn, R. Proc. Natl. Acad. Sci. U.S.A. 1969, 63, 292-299.
16. Brinkmann, M.; Lipowsky, R. J. Appl. Phys. 2002, 92, 4296-4306.
17. Seemann, R.; Brinkmann, M.; Kramer, E. J.; Lange, F. F.; Lipowsky, R. Proc. Natl. Acad. Sci. U.S.A. 2005, 102, 1848-1852.