Development of porous metal oxide thin films by co-evaporation

Applied Surface Science

Volumn 253, Issue 11, 2007, Pages 4853-4859

  Tesfamichael, T ^a   Motta, Nunzio ^a   Bostrom, Thor ^a   Bell, J M ^a  

^a QUEENSLAND UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

Co evaporated TiO 2 WO 3 thin film; Metal oxide gas sensors; Oblique deposition; Porosity; Surface characterization

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; DEPOSITION; EVAPORATION; POROSITY; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; TITANIUM OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

METAL OXIDE GAS SENSORS; OBLIQUE DEPOSITION; SURFACE CHARACTERIZATION; TUNGSTEN OXIDE POWDERS;

THIN FILMS;

EID: 33847266399     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.065     Document Type: Article

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