Titanium carbonitride films on cemented carbide cutting tool prepared by pulsed high energy density plasma

Applied Surface Science

Volumn 253, Issue 11, 2007, Pages 4923-4927

  Feng, Wenran ^a   Liu, Chizi ^a   Chen, Guangliang ^a   Zhang, Guling ^a   Gu, Weichao ^a   Niu, Erwu ^a   Yang, Si Ze ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

Carbides; Nanostructure; PHEDP; Thin films

Indexed keywords

ADHESION; ION IMPLANTATION; MICROSTRUCTURE; PLASMAS; SUBSTRATES; TITANIUM NITRIDE;

DENSE FILMS; HARD FILMS; PULSED HIGH ENERGY DENSITY PLASMA (PHEDP); TITANIUM CARBONITRIDE (TICN);

THIN FILMS;

EID: 33847246964     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.069     Document Type: Article

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