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Volumn 9, Issue 1-2, 2001, Pages 101-108
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SiC/DLC composite layers synthesised by the IPD method
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER MOBILITY;
CHEMICAL VAPOR DEPOSITION;
COMPOSITE MATERIALS;
CRYSTAL LATTICES;
GRAIN SIZE AND SHAPE;
HEAT CONDUCTION;
SEMICONDUCTOR MATERIALS;
SINGLE CRYSTALS;
SYNTHESIS (CHEMICAL);
BANDGAP;
COMPOSITE LAYERS;
PLASMA REACTANTS;
SEMICONDUCTOR PROPERTIES;
SILICON CARBIDE;
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EID: 23844482558
PISSN: 1524511X
EISSN: None
Source Type: Journal
DOI: 10.1106/152451102025835 Document Type: Article |
Times cited : (4)
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References (17)
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