Photolithographic deposition of indium oxide from metalorganic films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 897-901

  Ching, Celia L W ^a   Hill, Ross H ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032384631     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581032     Document Type: Article

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