Anatase TiO2 films obtained by cathodic arc deposition

Surface and Coatings Technology

Volumn 201, Issue 14, 2007, Pages 6358-6362

  Kleiman, A ^a   Marquez A ^a   Lamas, D G ^b  

^a Instituto de Fisica del Plasma Buenos Aires   (Argentina)

^b Instituto de Investigaciones Cientificas y Tecnicas de Las Fuerzas Armadas   (Argentina)

Author keywords

Arc evaporation; Atomic force microscopy (AFM); Structure; Titanium oxide

Indexed keywords

DEPOSITION; GRAIN SIZE AND SHAPE; PHASE TRANSITIONS; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

ARC EVAPORATION; CATHODIC ARC DEPOSITION; CRYSTALLINE STRUCTURE;

TITANIUM DIOXIDE;

DEPOSITION; GRAIN SIZE AND SHAPE; PHASE TRANSITIONS; SURFACE MORPHOLOGY; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS; TITANIUM DIOXIDE;

EID: 33847163702     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.12.002     Document Type: Article

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