Surface morphology and the phase formation at Cr/Si system

Applied Surface Science

Volumn 253, Issue 10, 2007, Pages 4721-4726

  Agarwal, Shivani ^a   Jain, Ankur ^a   Lal, Chhagan ^a   Ganesan, V ^b   Jain, I P ^a  

^a UNIVERSITY OF RAJASTHAN   (India)

^b UGC DAE CONSORTIUM FOR SCIENTIFIC RESEARCH   (India)

Author keywords

AFM; GIXRD; Metal silicide; Nanorods; Solid state mixing; XRR

Indexed keywords

ELECTRON BEAMS; EVAPORATION; INTEGRATED CIRCUITS; SILICON COMPOUNDS; SURFACES; THERMODYNAMIC STABILITY; ULTRAHIGH VACUUM;

METAL SILICIDE; NANORODS; SOLID STATE MIXING;

CHROMIUM COMPOUNDS;

EID: 33847058471     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.063     Document Type: Article

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