Transport, optical and thermoelectrical properties of Cr and Fe disilicides and their alloys on Si(1 1 1)

Applied Surface Science

Volumn 175-176, Issue , 2001, Pages 299-305

  Galkin, N G ^a,b   Konchenko, A V ^a   Vavanova, S V ^a   Maslov, A M ^a   Talanov, A O ^b  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^b FAR EASTERN FEDERAL UNIVERSITY   (Russian Federation)

Author keywords

Alloy; Band structure; Shunting effect; Silicide; Template

Indexed keywords

BAND STRUCTURE; CHROMIUM COMPOUNDS; CRYSTAL STRUCTURE; DEPOSITION; EPITAXIAL GROWTH; FILM GROWTH; HALL EFFECT; IRON COMPOUNDS; LIGHT ABSORPTION; SEMICONDUCTOR DEVICE MODELS; SUBSTRATES; THIN FILMS; TRANSPORT PROPERTIES;

HOT SILICON SUBSTRATES; SHUNTING EFFECTS;

SEMICONDUCTING FILMS;

EID: 0035873260     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00062-9     Document Type: Article

References (14)

1. S.P. Murarka, Silicides for BVLSI Applications, Academic Press, New York, 1983.
2. Bost M.C., Mahan J.E. J. Appl. Phys. 58:1985;2696.
3. Michel E.G. Appl. Surf. Sci. 117/118:1997;294.
4. Jentzsch F., Froitzheim H., Theile R. J. Appl. Phys. 66:1989;5901.
5. Henzler M., Adamski C., Rönner K. Vac. Sci. Technol. A. 5:1987;2127.
6. Dimitriadis C.A., Werner J.E., Logothetidis S., Stutzmann M., Weber J., Nesper R. J. Appl. Phys. 68:1990;1726.
7. Mahan J.E., Geib K.M., Robinson G.Y., Long R.G., Xinghua Y., Bai G., Nicolet M.A., Nathan M. Appl. Phys. Lett. 56:1990;2126.
8. Plusnin N.I., Galkin N.G., Lifshits V.G. Surf. Rev. Lett. 2:1995;439.
9. Galkin N.G., Ivanov V.A., Konchenko A.V., Goroshko D.L. Instr. Exp. Tecnigues. 42(2):1999;127.
10. Galkin N.G., Maslov A.M., Konchenko A.V. Thin Solid Films. 311:1997;230.
11. Jedrecy N., Zheng Y., Waldhauer A., Sauvage-Simkin M., Pinchaux R. Phys. Rev. B. 48:1993;8801.
12. R.A. Smith, Semiconductors, 2nd Edition, Cambridge University Press, Cambridge, 1978.
13. Henrion W., Lange H., Jahne E., Giehler M. Appl. Surf. Sci. 70/71:1993;569.
14. Tassis D.H., Dimitriadis C.A., Boultadakis S., Arvanitidis J., Ves S., Kokkou S., Logothetidis S., Valassiades O., Poulopoulos P., Flevaris N.K. Thin Solid Films. 310:1997;120.