Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots

International Journal of Production Research

Volumn 45, Issue 3, 2007, Pages 487-507

  Lee, Tae Eog ^a   Lee, Hwan Yong ^a   Lee, Sang Jin ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Handling robots; Petri nets; Scheduling; Semiconductor manufacturing; Wet station

Indexed keywords

CLEANING; COMPUTATIONAL METHODS; INTEGER PROGRAMMING; MATHEMATICAL MODELS; PETRI NETS; PROBLEM SOLVING; ROBOTS; SCHEDULING; SILICON WAFERS;

HANDLING ROBOTS; INTEGER PROGRAMMING MODELS; SEMICONDUCTOR MANUFACTURING; WET STATIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 33847040478     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/00207540600792531     Document Type: Conference Paper

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