Development of free-surface microstereolithography with ultra-high resolution to fabricate hybrid 3-D microdevices

Proceedings of the 2005 International Symposium on Micro-NanoMechatronics and Human Science, Eighth Symposium on Micro- and Nano-Mechatronics for Information-Based Society - The 21st Century COE Progr

Volumn 2005, Issue , 2005, Pages 273-278

  Kobayashi, Kengo ^a   Ikuta, Koji ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; LAMINATES; LITHOGRAPHY; LSI CIRCUITS; MICROPROCESSOR CHIPS; MICROSTRUCTURE; RESINS;

FLUOROCARBON RESIN; MENISCUS; MICRODEVICES; MICROSTEREOLITHOGRAPHY; SQUEEGEE AFFECTS;

BIOMEDICAL EQUIPMENT;

EID: 33847031346     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2005.1590003     Document Type: Conference Paper

References (11)

1. Y. Chen, A. Pepin, "Nanofabrication: Conventional and nonconvensional methods", Electrophoresis, 22, pp. 187-207, 2001
2. Y. Hirata, "LIGA process -micromachining technique using synchrotron radiation lithography- and some industrial applications", Nuclear Instruments and Methods in Physical Research B, 208, pp.21-26, 2003
3. B.L. Gray, D. Jaeggi, N.J.Mourlas, B.P. van Drieënhuizen, K.R. Williams, N.I. Maluf, G.T.A. Kovacs, "Novel interconnection technologies for intergrated microfluidic systems", Sensors and Actuators A, 77, pp57-65, 1999
4. K.Ikuta, K.Hirowatari, "Real Three Dimensional Micro Fabrication Using Stereo Lithography and Metal Molding", Proc. of IEEE International Conference on Micro Electro Mechanical Systems (MEMS'93), pp.42-47, 1993
5. K.Ikuta, S.Maruo, T.Fujisawa and A.Yamada, "Micro Concentrator with Opto-sense Micro Reactor for Biochemical IC Chip Family - 3D Composite Structure and Experimental Verification -," Proc. of IEEE International Conference on Micro Electro Mechanical Systems MEMS'99, pp.376-381, 1999
6. S. Maruo, Koji Ikuta, "Submicron stereolithography for production of fleely movable mechanisms by using single-photon polymerization", Sensors and Actuators A, 100, pp.70-76, 2002
7. S.Maruo, K.Ikuta, H.Korogi, "Force-Controllable, Optically Driven Micromachines Fabricated by Single-Step Two-Photon Microstereolithography", J. Microelectromech. Syst., 12, pp.533-539, 2003
8. K.Ikuta, A.Takahashi, S.Maruo, "In-chip cell-free protein synthesis from DNA by using biochemical IC chips", Proc. of IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01), pp.455-458, 2001
9. K. Ikuta, Y. Sasaki, H. Maegawa, S. Maruo and T. Hasegawa, "Biochemical IC chips for pretreatment in biochemical experiments", Proc. of IEEE International Conference on Micro Mechanical Systems (MEMS'03), pp. 343-346, 2003
10. J.Cooper McDonald, David C.Duffy, Janelle R.Anderson, Daniel T.Chiu, Hongkai Wu, Olivier J.A.Schneller, George M.Whitesides, "Fabrication of microfluidic systems in poly(dimethylsiloxane)", Electrophoresis, 21, pp.27-40, 2000
11. A. Bertsch, H. Lorenz, P. Renaud, "3D microfabrication by combining microstereolithography and thick resist UV lithography", Sensors and Actuators, 73, pp.14-23, 1999