Integration of SiGe to MEMS applications

ECS Transactions

Volumn 3, Issue 7, 2006, Pages 1123-1130

  Reiche, M ^a  

^a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; ELECTRONIC PROPERTIES; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; SEMICONDUCTING GERMANIUM; SEMICONDUCTOR GROWTH;

DEFORMABLE ELEMENTS; MECHANICAL NANODEVICES; SILICON-BASED TECHNOLOGY; STRAIN ENGINEERING;

SEMICONDUCTING SILICON;

EID: 33846976710     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2355906     Document Type: Conference Paper

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