Vacuum-ultraviolet optical properties of ion beam assisted fluoride coatings for free electron laser applications

Thin Solid Films

Volumn 515, Issue 7-8, 2007, Pages 3858-3866

  Sarto, F ^a   Nichelatti, E ^a   Flori, D ^a   Vadrucci, M ^a   Santoni, A ^b   Pietrantoni, S ^c   Guenster, S ^d   Ristau, D ^d   Gatto, A ^e   Trovo M ^f   Danailov, M ^f   Diviacco, B ^f  

^a ENEA   (Italy)

^b ENEA   (Italy)

^c UNIVERSITY OF ROME TOR VERGATA   (Italy)

^d LASER ZENTRUM HANNOVER E V   (Germany)

^e FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^f SINCROTRONE TRIESTE   (Italy)

Author keywords

Evaporation; Fluorides; Ion bombardment; Optical coatings; Optical properties; PVD

Indexed keywords

EVAPORATION; FLUORINE; FREE ELECTRON LASERS; ION BEAMS; ION BOMBARDMENT; SYNCHROTRON RADIATION; ULTRAVIOLET RADIATION;

FLUORIDE COATINGS; PACKING DENSITY; PEAK REFLECTANCE; PHOTONIC CLEANING;

OPTICAL COATINGS;

EID: 33846945441     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.10.122     Document Type: Article

References (37)

1. Dumas L., Quesnel E., Pierre F., and Bertin F. J. Vac. Sci. Technol. A 20 (2002) 102
2. Dumas L., Quesnel E., Robic J.-Y., and Pauleau Y. Thin Solid Films 382 (2001) 61
3. Quesnel E., Dumas L., Jacob D., and Peirò F. J. Vac. Sci. Technol. A 18 (2000) 2869
4. Martin P.J., Sainty W.G., Netterfield R.P., McKenzie D.R., Cockayne D.J.H., Sie S.H., Wood O.R., and Craighead H.G. Appl. Opt. 26 (1987) 1235
5. Kennedy M., Ristau D., and Niederwald H.S. Thin Solid Films 333 (1998) 191
6. Atanassov G., Turlo J., Fu J.K., and Dai Y.S. Thin Solid Films 342 (1999) 83
7. Scaglione S., Flori D., Soymiè I., and Piegari A. Thin Solid Films 214 (1992) 188
8. Kolbe J., and Shink H. Proc. SPIE Int. Soc. Opt. Eng. 1782 (1993) 433
9. Targove J.D., Lingg L.J., Lehan J.P., and Macleod H.A. Appl. Opt. 27 (1988) 213
10. Targove J., Lehan J.P., Lingg L.J., Macleod H.A., Leavitt J., and McIntyre L.C. Appl. Opt. 26 (1987) 3733
11. Vig J.R. J. Vac. Sci. Technol. A 3 (1985) 1027
12. Eva E., Mann K., Kaiser N., Anton B., Henking R., Ristau D., Weissbrodt P., Mademann D., Raupach L., and Hacker E. Appl. Opt. 35 (1996) 5613
13. Li B., Martin S., and Welsch E. Appl. Phys. A 74 (2002) 27
14. Blunt R.F., and Cohen M.I. Phys. Rev. 153 (1967) 1031
15. Günster S., Blaschke H., Starke K., Ristau D., Danailov M., Diviacco B., Gatto A., Kaiser N., Sarto F., and Masetti E. SPIE Proc. Ser. 5273 (2004) 281
16. Günster S., Blaschke H., Ristau D., Danailov M., Trovò M., Gatto A., Kaiser N., Sarto F., Flori D., and Menchini F. SPIE Proc. Ser. 5250 (2004) 146
17. J.F. Ziegler, SRIM.com, Annapolis, MD, 21037 USA, J.P. Biersack, Hahn-Meitner Inst. 1 Berlin vol. 39 Germany, program version SRIM-2003.26.
18. Montecchi M., Montereali R.M., and Nichelatti E. Thin Solid Films 396 (2001) 262
19. Montecchi M., Montereali R.M., and Nichelatti E. Thin Solid Films 402 (2002) 311
20. Montecchi M., Nichelatti E., Mancini A., and Montereali R.M. J. Appl. Phys. 86 (1999) 3745
21. Nichelatti E., Montereali R.M., Montecchi M., and Marolo T. J. Non-Cryst. Solids 322 (2003) 117
22. Montecchi M., Nichelatti E., Montereali R.M., Piccinini M., and Somma F. Opt. Quantum Electron. 36 (2004) 43
23. Blaschke H., Kohlhaas J., Kadkhoda P., and Ristau D. SPIE Proc. Ser. 4932 (2003) 536
24. Vriens L., and Rippens W. Appl. Opt. 22 (1983) 4105
25. Potter R.F. In: Palik E.D. (Ed). Handbook of Optical Constants of Solids (1985), Academic Press, Orlando chap. 2
26. Nichelatti E., Bonfigli F., Faenov A.Ya., Flora F., Marolo T., Montecchi M., Montereali R.M., Pikuz T., and Baldacchini G. J. Non-Cryst. Solids 351 (2005) 1774
27. Press W.H., Teukolsky S.A., Vetterling W.T., and Flannery B.P. Numerical Recipes in C - The Art of Scientific Computing. 2nd Ed. (1992), Cambridge University chap. 10
28. Seitz F. Rev. Mod. Phys. 26 (1954) 7
29. Zhukova E.V., Zolotarev V.M., and Maegaryants N.B. J. Opt. Technol. 68 (2002) 154
30. Radzhabov E.A., Shalaev A., and Nepomnyashikh A.I. Radiat. Meas. 29 (1998) 307
31. Itoh N. Adv. Phys. 31 (1982) 491
32. Giuliani G. Phys. Rev. B 2 (1970) 464
33. Giuliani G. Phys. Rev. B 4 (1971) 2054
34. Radzhabov E. Mater. Sci. Forum 239 (1997) 261
35. Dexter D.L. Phys. Rev. 101 (1956) 48
36. Infrared spectra handbook of inorganic compounds, Sadtler Research Laboratories, Division of Bio-Rad Laboratories Inc., Philadelphia, 1984.
37. Günster St., Ristau D., Trovó M., Danailov M., Gatto A., Kaiser N., Sarto F., and Piegari A. Proc. Optical System Design 2005, 12-16 September 2005, Jena. SPIE Proceeding vol. 5963 (2005) 59632A