Optical and microstructural properties of MgF2 UV coatings grown by ion beam sputtering process

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 6, 2000, Pages 2869-2876

  Quesnel, E ^a   Dumas, L ^a   Jacob, D ^b   Peiro F ^b  

^a CEA LETI   (France)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DIFFUSION IN SOLIDS; FILM GROWTH; LIGHT ABSORPTION; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; RAPID THERMAL ANNEALING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ION BEAM SPUTTERING;

OPTICAL FILMS;

EID: 0034315371     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1290374     Document Type: Article

References (15)

1. E. Eva, K. Mann, N. Kaiser, B. Anton, R. Henking, D. Ristau, P. Weissbrodt, D. Mademann, L. Raupach, and E. Hacker, Appl. Opt. 35, 5613 (1996).
2. J. D. Targove, Ph.D. thesis, University of Arizona, 1987.
3. M. Kennedy, D. Ristau, and H. S. Niederwald, Thin Solid Films 333, 191 (1998).
4. E. Quesnel, M. Berger, J. Cigna, D. Duca, C. Pellé, and F. Pierre, Proc. SPIE 2776, 366 (1996).
5. L. Martinu, H. Biedermann, and L. Holland, Vacuum 35, 531 (1985).
6. T. H. Allen, J. P. Lehan, and L. C. McInctyre, Jr., Proc. SPIE 1323, 277 (1990).
7. H. Schink, J. Kolbe, F. Zimmermann, D. Ristau, and H. Welling, Proc. SPIE 1441, 327 (1990).
8. E. Quesnel, J. Dijon, L. Dumas, P. Garrec, C. Pelleacute;, L. Poupinet, and B. Rolland, Proceedings of Optical Interference Coatings, Tucson, AZ, OSA Technical Digest Series 9, 1998, p. 47.
9. H. Blaschke, R. Thielsch, J. Heber, N. Kaiser, S. Martin, and E. Welsch, Proc. SPIE 3578, 74 (1998).
10. W. A. Sibley and O. E. Facey, Phys. Rev. 174, 1076 (1968).
11. R. F. Blunt and M. I. Cohen, Phys. Rev. 153, 1031 (1967).
12. V. I. Baryshnikov, L. I. Shchepina, S. V. Dorokhov, and T. A. Kolesnikova, Opt. Spectrosc. 73, 291 (1992).
13. D. L. Dexter, Phys. Rev. 101, 48 (1956).
14. N. Seifert, S. Vijayalakshmi, Q. Yan, A. Barnes, R. Albridge, H. Ye, N. Tolk, and W. Husinsky, Radiat. Eff. Defects Solids 128, 15 (1994).
15. C. R. A. Catlow, R. James, and M. J. Norgett, J. Phys. Colloq. 37, 443 (1976).