DUV/VUV spectrophotometry for high precision spectral characterization

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4932, Issue , 2003, Pages 536-543

  Blaschke, H ^a   Kohlhaas, J ^a   Kadkhoda, P ^a   Ristau, D ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

DUV VUV; ISO DIS 15368; Rowland circle; Seya Namioka

Indexed keywords

COMPUTER SOFTWARE; ERROR ANALYSIS; GAIN MEASUREMENT;

OPTICAL COMPONENTS;

ULTRAVIOLET SPECTROPHOTOMETERS;

EID: 0042862968     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472387     Document Type: Conference Paper

References (8)

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3. M. Seya. A new mounting of concave grating suitable for a spectrometer. Science of Light, 1952.
4. T. Namioka, H. Noda, and M. Seya. Performance of aberration-reduced holographic concave gratings designed specifically for seya-namioka monochromators. Journal of the Spectroscopical Society, 1974.
5. M.C. Hutley. Diffraction gratings. Academic Press,Inc., 1982.
6. W.R. Hunter. Diffraction Gratings and Mountings for the Vacuum Ultraviolet Spectral Region., volume IV. of Spectrometric Techniques. 1985.
7. 2 for 157 nm Lithography. 157nm Technical Data Review, 2001. oral presentation.
8. K. Starke, M. Jupe, H. Ehlers, and D. Ristau. Investigation in High-Precision Reflectivity Measurements According to ISO 13697. LBOC6: 6th workshop on laser beam and optics characterization, Proc., June 2001.