Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition

Thin Solid Films

Volumn 382, Issue 1-2, 2001, Pages 61-68

  Dumas, L ^a   Quesnel, E ^a   Robic, J Y ^a   Pauleau, Y ^b  

^a CEA LETI   (France)

^b GRENOBLE INSTITUTE OF TECHNOLOGY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; DEPOSITION; EVAPORATION; FUSED SILICA; ION BEAMS; ION BOMBARDMENT; KINETIC ENERGY; MAGNESIUM COMPOUNDS; RESIDUAL STRESSES; SILICON; SINGLE CRYSTALS; THIN FILMS;

ION BEAM ASSISTED DEPOSITION (IBAD); MAGNESIUM FLUORIDE;

OPTICAL FILMS;

EID: 0034836108     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01414-0     Document Type: Article

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