Carrier concentration and mobility profiling in quantum wells by scanning probe microscopy

Microelectronic Engineering

Volumn 84, Issue 3, 2007, Pages 446-449

  Giannazzo, F ^a   Raineri, V ^a   Mirabella, S ^b   Impellizzeri, G ^b   Priolo, F ^b  

^a CNR IMM   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARRIER CONCENTRATION; CARRIER MOBILITY; MICROSCOPIC EXAMINATION; SEMICONDUCTOR DOPING; SEMICONDUCTOR MATERIALS;

DRIFT MOBILITY; SCANNING CAPACITANCE MICROSCOPY (SCM); SCANNING PROBE MICROSCOPY; SURFACE SCATTERING;

SEMICONDUCTOR QUANTUM WELLS;

EID: 33846910191     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.10.065     Document Type: Article

References (10)

1. Matey J.R., and Blanc J. J. Appl. Phys. 57 (1985) 1437
2. Williams C.C., Slinkman J., Hough W.P., and Wickramasinghe H.K. J. Vac. Sci. Technol. A 8 (1990) 895
3. De Wolf P., Clarysse T., Vandervorst W., Snauwaert J., and Hellemans L. J. Vac. Sci. Technol. B 14 (1996) 380
4. Maknys K., Douhéret O., and Anand S. Appl. Phys. Lett. 83 (2003) 4205
5. Maknys K., Douhéret O., and Anand S. Appl. Phys. Lett. 83 (2003) 2184
6. Giannazzo F., Goghero D., and Raineri V. J. Vac. Sci. Technol. B 22 (2004) 2391
7. People R., and Bean J.C. Appl. Phys. Lett. 48 (1986) 538
8. Tsujino S., Falub C.V., Müller E., Scheinert M., Diehl L., Gennser U., Fromherz T., Borak A., Sigg H., Grützmacher D., Campidelli Y., Kermarrec O., and Bensahel D. Appl. Phys. Lett. 84 (2004) 2829
9. Giannazzo F., Raineri V., La Magna A., Mirabella S., Impellizzeri G., Piro A.M., Priolo F., Napolitani E., and Liotta S.F. J. Appl. Phys. 97 (2005) 014302
10. Giannazzo F., Raineri V., Mirabella S., Impellizzeri G., and Priolo F. Appl. Phys. Lett. 88 (2006) 043117