One- and two-dimensional carrier profiling in semiconductors by nanospreading resistance profiling

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 380-385

  De Wolf, P ^a   Clarysse, T ^a   Vandervorst, W ^a   Snauwaert, J ^b   Hellemans, L ^b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010836634     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588478     Document Type: Article

References (16)

1. M. Pawlik, J. Vac. Sci. Technol. B 10, 388 (1992).
2. P. De Wolf, J. Snauwaert, T. Clarysse, W. Vandervorst, and L. Hellemans, Appl. Phys. Lett. 66, 1530 (1995).
3. C. Shafai, D. J. Thompson, M. Simard-Nomardin, G. Mattiusi, and P. J. Scanlon, Appl. Phys. Lett. 64, 342 (1994).
4. D. C. D'Avanzo, C. Clare, and C. Dell'Oca, J. Electrochem. Soc. 127, 2704 (1980).
5. D. C. D'Avanzo, R. D. Rung, A. Gat, and R. W. Dutton, J. Electrochem. Soc. 125, 1170 (1978).
6. S. M. Hu, J. Appl. Phys. 53, 1499 (1982).
7. A. Casel and H. Jorke, Appl. Phys. Lett. 50, 989 (1987).
8. C. M. Osburn, H. L. Berkowitz, J. M. Heddleson, R. J. Hillard, R. G. Mazur, and P. Rai-Choudhury, J. Vac. Sci. Technol. B 10, 533 (1991).
9. W. Vandervorst, V. Privitera, V. Raineri, T. Clarysse, and M. Pawlik, J. Vac. Sci. Technol. B 12, 276 (1994).
10. V. Privitera, W. Vandervorst, and T. Clarysse, J. Electrochem. Soc. 140, 262 (1993).
11. Digital Instruments, Inc., Santa Barbara, CA 93103.
12. P. A. Schumann and E. E. Gardner, Solid-State Electron. 12, 371 (1969).
13. T. Clarysse and W. Vandervorst, Solid-State Electron. 31, 53 (1988).
14. R. G. Mazur, J. Vac. Sci. Technol. B 10, 397 (1992).
15. T. Clarysse and W. Vandervorst, J. Vac. Sci. Technol. B 10, 413 (1992).
16. T. Clarysse, P. De Wolf, H. Bender, and W. Vandervorst, J. Vac. Sci. Technol. B 14, 358 (1996).