Control of nanostructures induced by ion sputtering

Nanotechnology

Volumn 18, Issue 2, 2007, Pages

  Huang, Yizhong ^a   Cockayne, David ^a  

^a UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; ION BEAMS; MONITORING; SEMICONDUCTING GERMANIUM COMPOUNDS; SPUTTERING;

BEAM CURRENTS; END-POINT DETECTION (EPD); ION BEAM SPUTTERING;

NANOSTRUCTURED MATERIALS;

EID: 33846839500     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/2/025305     Document Type: Article

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