Highly sensitive Pirani vacuum gauge

International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

Volumn 2, Issue , 1995, Pages 167-170

  Chou, Bruce C S ^a   Shie, Jin Shown ^a   Chen, Yeong Maw ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COOLING; HEAT LOSSES; MICROMACHINING; PRESSURE; READOUT SYSTEMS; SCANNING ELECTRON MICROSCOPY; STRESSES; SUBSTRATES; THERMAL EFFECTS; THERMAL INSULATION; THERMOELECTRICITY; VACUUM GAGES;

PIEZORESISTIVITY; PIRANI SENSOR; PIRANI VACUUM GAGE; THERMOELECTRIC COOLING; VACUUM PRESSURE;

SENSORS;

EID: 0029489305     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)