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Journal of Materials Science and Technology

Volumn 13, Issue 4, 1997, Pages 245-248

Mechanical properties of polycrystalline TiN/TaN multilayers

(2) Soe, W H a Yamamoto, R a

a INSTITUTE OF INDUSTRIAL SCIENCE (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL PROPERTIES; MULTILAYERS; POLYCRYSTALLINE MATERIALS; TANTALUM COMPOUNDS;

ELASTIC ANOMALY; MULTILAYER COMPOSITES; NANOINDENTATION TESTER;

TITANIUM NITRIDE;

EID: 0031108414 PISSN: 10050302 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (4)

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