Nano-scratch experiments of Au/NiCr multi-layered films for microwave integrated circuits

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5664-5666

  Tang, Wu ^a   Weng, Xiaolong ^a   Deng, Longjiang ^a   Xu, Kewei ^b   Lu, Jian ^c  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b XI'AN JIAOTONG UNIVERSITY   (China)

^c UNIVERSITÉ DE TECHNOLOGIE DE TROYES   (France)

Author keywords

Critical load; Metallic films; Nano scratch

Indexed keywords

GOLD ALLOYS; MAGNETRON SPUTTERING; MICROWAVE INTEGRATED CIRCUITS; PLASTIC DEFORMATION;

CRITICAL LOAD; NANO-SCRATCH; SCRATCH LOAD;

METALLIC FILMS;

GOLD ALLOYS; MAGNETRON SPUTTERING; METALLIC FILMS; MICROWAVE INTEGRATED CIRCUITS; PLASTIC DEFORMATION;

EID: 33846522268     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.054     Document Type: Article

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