Effect of substrate on surface morphology evolution of Cu thin films deposited by magnetron sputtering

Surface and Coatings Technology

Volumn 201, Issue 9-11 SPEC. ISS., 2007, Pages 5574-5577

  Yang, Jijun ^a   Huang, Youlan ^a   Xu, Kewei ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

Cu; Dynamic scaling; Magnetron sputtering; Surface morphology; Thin film

Indexed keywords

MAGNETRON SPUTTERING; MORPHOLOGY; SUBSTRATES; SURFACE ROUGHNESS; SURFACES; THIN FILMS;

DYNAMIC SCALING; GROWTH EXPONENT; ROUGHNESS EXPONENT; SURFACE EVOLUTION;

COPPER;

COPPER; MAGNETRON SPUTTERING; MORPHOLOGY; SUBSTRATES; SURFACE ROUGHNESS; SURFACES; THIN FILMS;

EID: 33846504366     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.07.227     Document Type: Article

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