Effect of ion bombardment on in-plane texture, surface morphology, and microstructure of vapor deposited Nb thin films

Journal of Applied Physics

Volumn 81, Issue 10, 1997, Pages 6754-6761

  Ji, Hong ^a   Was, Gary S ^a   Jones, J Wayne ^a   Moody, Neville R ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009114885     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365217     Document Type: Article

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