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Volumn 42, Issue 1, 2007, Pages 228-231
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Study on structure of AlGaN on AlN interlayer by synchrotron radiation XRD and RBS
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM NITRIDE;
CRYSTAL STRUCTURE;
DISLOCATIONS (CRYSTALS);
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
VAPOR PHASE EPITAXY;
X RAY DIFFRACTION ANALYSIS;
CRYSTALLINE QUALITY;
INCORPORATION EFFICIENCY;
THREADING DISLOCATIONS (TD);
ALUMINUM COMPOUNDS;
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EID: 33846483774
PISSN: 00222461
EISSN: 15734803
Source Type: Journal
DOI: 10.1007/s10853-006-1056-x Document Type: Article |
Times cited : (3)
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References (11)
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