Thin film/substrate systems featuring arbitrary film thickness and misfit strain distributions. Part I: Analysis for obtaining film stress from non-local curvature information

International Journal of Solids and Structures

Volumn 44, Issue 6, 2007, Pages 1745-1754

  Ngo, D ^a   Feng, X ^a   Huang, Y ^a   Rosakis, A J ^b   Brown, M A ^b  

^a University of Illinois at Urbana Champaign   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Interfacial shears; Non local stress curvature relations; Non uniform film thickness; Non uniform misfit strain; Thin films

Indexed keywords

INTERFACES (MATERIALS); SUBSTRATES; THICKNESS MEASUREMENT; THIN FILMS;

INTERFACIAL SHEARS; NON UNIFORM FILM THICKNESS; NON UNIFORM MISFIT STRAIN; NONLOCAL STRESS-CURVATURE RELATIONS;

STRAIN MEASUREMENT;

EID: 33846468826     PISSN: 00207683     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijsolstr.2006.10.016     Document Type: Article

References (17)

1. Feng, X., Huang, Y., Jiang, H., Ngo, D., Rosakis, A.J., 2006. The effect of thin film/substrate radii on the Stoney formula for thin film/substrate subjected to non-uniform axisymmetric misfit strain and temperature. J. Mech. Mater. Struct. (in press).
2. Finot M., Blech I.A., Suresh S., and Fijimoto H. Large deformation and geometric instability of substrates with thin-film deposits. J. Appl. Phys. 81 (1997) 3457-3464
3. Freund L.B. A criterion for arrest of a threading dislocation in a strained epitaxial layer due to an interface misfit dislocation in its path. J. Appl. Phys. 68 (1990) 2073-2080
4. Freund L.B. Substrate curvature due to thin film mismatch strain in the nonlinear deformation range. J. Mech. Phys. Solids 48 (2000) 1159
5. Freund L.B., and Suresh S. Thin Film Materials; Stress, Defect Formation and Surface Evolution (2004), Cambridge University Press, Cambridge, UK
6. Gillard V.T., Nix W.D., and Freund L.B. Role of dislocation blocking in limiting strain relaxation in heteroepitaxial films. J. Appl. Phys. 76 (1994) 7280-7287
7. Huang Y., and Rosakis A.J. Extension of Stoney's Formula to non-uniform temperature distributions in thin film/substrate systems. The case of radial symmetry. J. Mech. Phys. Solids 53 (2005) 2483-2500
8. Huang Y., Ngo D., and Rosakis A.J. Non-uniform, axisymmetric misfit strain: in thin films bonded on plate substrates/substrate systems: the relation between non-uniform film stresses and system curvatures. Acta. Mech. Sin. 21 (2005) 362-370
9. Lee H., Rosakis A.J., and Freund L.B. Full field optical measurement of curvatures in ultra-thin film/substrate systems in the range of geometrically nonlinear deformations. J. Appl. Phys. 89 (2001) 6116-6129
10. Masters C.B., and Salamon N.J. Geometrically nonlinear stress-deflection relations for thin film/substrate systems. Int. J. Eng. Sci. 31 (1993) 915-925
11. Ngo, D., Huang, Y., Rosakis, A.J., Feng, X. 2006. Spatially non-uniform, isotropic misfit strain in thin films bonded on plate substrates: the relation between non-uniform film stresses and system curvatures. Thin Solid Films (in press).
12. Park T.S., and Suresh S. Effects of line and passivation geometry on curvature evolution during processing and thermal cycling in copper interconnect lines. Acta Mater. 48 (2000) 3169-3175
13. Salamon N.J., and Masters C.B. Bifurcation in isotropic thin film/substrate plates. Int. J. Solids Struct. 32 (1995) 473-481
14. Shen Y.L., Suresh S., and Blech I.A. Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers. J. Appl. Phys. 80 (1996) 1388-1398
15. Stoney G.G. tension of metallic films deposited by electrolysis. Proc. R. Soc. Lond. A82 (1909) 172-175
16. Wikstrom A., Gudmundson P., and Suresh S. Thermoelastic analysis of periodic thin lines deposited on a substrate. J. Mech. Phys. Solids 47 (1999) 1113-1130
17. Wikstrom A., Gudmundson P., and Suresh S. Analysis of average thermal stresses in passivated metal interconnects. J. Appl. Phys. 86 (1999) 6088-6095