Low dielectric constant porous BN/SiCO made by pyrolysis of filled gels

Journal of the European Ceramic Society

Volumn 27, Issue 6, 2007, Pages 2529-2533

  Valentinotti, Manuela ^a   Walter, Steffen ^b   Modena, Stefano ^a   Sorarù, Gian Domenico ^a  

^a UNIVERSITY OF TRENTO   (Italy)

^b SIEMENS AG   (Germany)

Author keywords

Dielectric properties; Porosity; Precursors organic; Silicon oxycarbides; Sol gel processes

Indexed keywords

PERMITTIVITY; POROSITY; PYROLYSIS; SILICON COMPOUNDS; SOL-GELS; VISCOSITY;

COMPOSITE CERAMICS; FILLED GELS; POROUS MICROSTRUCTURE; SILICON OXYCARBIDES; SOL-GEL PROCESSES;

CERAMIC MATERIALS;

CERAMIC MATERIALS; PERMITTIVITY; POROSITY; PYROLYSIS; SILICON COMPOUNDS; SOL-GELS; VISCOSITY;

EID: 33846357454     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jeurceramsoc.2006.08.015     Document Type: Article

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