Evaluation of ultra-low-k dielectric materials for advanced interconnects

Journal of Electronic Materials

Volumn 30, Issue 4, 2001, Pages 284-289

  Jin, C ^a,b   Lin, S ^a   Wetzel, J T ^a  

^a SEMATECH   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

Dielectric; Integration; Interconnect; Low k; Porosity; Porous low k; Sol gel; Thermal conductivity; Young's modulus

Indexed keywords

CROSSTALK; DEPOSITION; ELASTIC MODULI; INTEGRATED CIRCUITS; PERMITTIVITY; POROSITY; SOL-GELS; THERMAL CONDUCTIVITY;

POROUS DIELECTRIC FILM DEPOSITION;

DIELECTRIC FILMS;

EID: 0035306499     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0032-0     Document Type: Article

References (17)

1. S-P. Jeng, M. Chang, T. Kroger, P. McAnally ,and R.H. Havemann, 1994 VLSI Tech. Dig. 73 (1994).
2. W.W. Lee and P.S. Ho, MRS Bulletin 22, 19 (1997).
3. Semiconductor Industry Association, International Technology Roadmap for Semiconductors 1999 Edition (Austin, TX: SEMATECH, 1999).
4. L.W. Hrubesh, L.E. Keene, and V.R. Latorre, J. Mater. Res. 8, 1736 (1993).
5. J.L. Hedrick, K.R. Carter, J.W. Labadie, R.D. Miller, W. Volksen, C.J. Hawker, D.Y. Yoon, T.P. Russell, J.E. McGrath, and R.M. Briber, Adv. Polymer Sci. 141, 1 (1999).
6. C. Jin, J.D. Luttmer, D.M. Smith, and T.A. Ramos, MRS Bulletin 22, 39 (1997).
7. E.S. Moyer et al., Proc. IITC (Piscataway, NJ: IEEE, 1999), p. 196.
8. P.J. Bruinsma, N.J. Hess, J.R. Bontha, J. Liu, and S. Baskaran, MRS Symp. Proc. 445, 105 (1997).
9. Y. Lu, R. Ganguli, C.A. Drewien, M.T. Anderson, C.J. Brinker, W. Gong, Y. Guo, H. Soyez, B. Dunn, M.H. Huang, and J.I. Zink, Nature 389, 364 (1997).
10. E.O. Shaffer, P. Townsend, and J.-H. Im, Conf Proc. ULSI XII 12, 429 (1997).
11. C. Jin, L. Ting, K.J. Taylor, T. Seha, and J.D. Luttmer, Proc. 2nd DUMIC 21 (1996).
12. D.G. Cahill, M. Katiyar, and J.R. Abelson, Phys. Rev. B50, 6077 (1994).
13. W.L. Wu and H.-C. Liou, Thin Solid Films 312, 73 (1998).
14. J.S. Higgins and H.C. Benoit, Polymers and Neutron Scattering (Oxford, U.K.: Clarendon Press, 1994).
15. H.A. Hristov, B. Bolan, A.F. Yee, L. Xie, and D.W. Gidley, Macromolecules 29, 8507 (1996).
16. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).
17. E.T. Ryan, T. Cho, T. Malik, J.H. Zhao, J.K. Lee, and P.S. Ho, MRS Symp. Proc. 476, 135 (1997).