Variable optical attenuator using parallel plate electrostatic actuator

Journal of the Korean Physical Society

Volumn 45, Issue SUPPL., 2004, Pages

  Hur, J S ^a,b   Kim, T Y ^c   Shin, H J ^c   Moon, S ^c   Choi, I H ^a   Son, C S ^d  

^a Korea University   (South Korea)

^b Institute Science and Technology   (South Korea)

^c Korea Institute of Science and Technology   (South Korea)

^d Silla University   (South Korea)

Author keywords

Micro shutter; Parallel plate actuator; VOA

Indexed keywords

EID: 12744280153     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (8)

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