Fabrication and sensing behavior of piezoelectric microbridge transducer for nanobalance

Journal of the Korean Physical Society

Volumn 46, Issue 1, 2005, Pages 292-295

  Shin, Sanghun ^a   Paik, Jun Kyu ^a   Lee, Nae Eung ^a   Lee, Jaichan ^a   Park, Jun Shik ^b   Park, Hyo Derk ^b  

^a Sungkyunkwan University   (South Korea)

^b Korea Electronic Technology Institute (KETI)   (South Korea)

Author keywords

Mass sensor; MEMS; Microbridgc; PZT; Resonant frequency

Indexed keywords

EID: 12944284464     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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