A pillar-shaped antifuse-based silicon chemical sensor and actuator

IEEE Sensors Journal

Volumn 7, Issue 1, 2007, Pages 18-26

  Kovalgin, Alexey Y ^a   Holleman, Jisk ^a   Iordache, Gheorghe ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Antifuse; Chemical actuator; Chemical sensor; Micro reactor

Indexed keywords

ACTUATORS; ADSORPTION; DESORPTION; DIODES; ELECTRODES; SILICON;

ANTIFUSE; CHEMICAL ACTUATORS; MICRO-REACTORS;

CHEMICAL SENSORS;

EID: 33846314686     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.888602     Document Type: Article

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