A versatile micro-scale silicon sensor/actuator with low power consumption

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 1225-1228

  Kovalgin, A Y ^a   Holleman, J ^a   Iordache, G ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DETECTORS; ELECTRIC POWER UTILIZATION; NANOSTRUCTURED MATERIALS; POLYSILICON; SENSORS;

ADSORPTION-DESORPTION SENSORS; MICRO-SCALE SILICON SENSORS; SILICON DEVICES;

CMOS INTEGRATED CIRCUITS;

EID: 33846294850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597927     Document Type: Conference Paper

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