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Journal of Photopolymer Science and Technology

Volumn 19, Issue 6, 2006, Pages 705-708

Thermolysis of polymethacrylates for 193 nm resist

(6) Ogata, Toshiyuki a Kasai, Kohei a Matsumaru, Shogo a Takahashi, Motoki a Hada, Hideo a Shirai, Masamitsu b

a TOKYO OHKA KOGYO CO LTD (Japan)

b Osaka Prefecture University (Japan)

Author keywords

193 nm resist; Thermal degradation; Thermal desorption spectroscopy

Indexed keywords

EID: 33846311436 PISSN: 09149244 EISSN: 13496336 Source Type: Journal
DOI: 10.2494/photopolymer.19.705 Document Type: Article

Times cited : (3)

References (15)

1
- 24644459525
- A. P. Mahorowala, K. J. Chen, R. Sooriyakumaran, A. Clancy, D. Murthy, and S. Rasgon, Proc. SPIE, 5753 (2005) 380.
- (2005) Proc. SPIE , vol.5753 , pp. 380
- Mahorowala, A.P.¹ Chen, K.J.² Sooriyakumaran, R.³ Clancy, A.⁴ Murthy, D.⁵ Rasgon, S.⁶

2
- 33745629852
- H. Kawahira, N. Matsuzawa, E. Matsui, A. Ando, M. Kazi, A. Salam, M. Yoshida, Y. Yamazaki, K. Kugimiya, T. Tatsumi, H. Nakano, T. Iwai, and M. Irie, Proc. SPIE, 6153 (2006) 615319.
- (2006) Proc. SPIE , vol.6153 , pp. 615319
- Kawahira, H.¹ Matsuzawa, N.² Matsui, E.³ Ando, A.⁴ Kazi, M.⁵ Salam, A.⁶ Yoshida, M.⁷ Yamazaki, Y.⁸ Kugimiya, K.⁹ Tatsumi, T.¹⁰ Nakano, H.¹¹ Iwai, T.¹² Irie, M.¹³

3
- 0020497931
- H. Gokan, S. Esho, and Y. Ohnishi, J. Electrochem. Soc., 130 (1983) 143.
- (1983) J. Electrochem. Soc , vol.130 , pp. 143
- Gokan, H.¹ Esho, S.² Ohnishi, Y.³

4
- 33745598870
- 61530P
- M. J. May, B. Mortini, C. Sourd, D. Perret, D. W. Chung, G. Barclay, C. Brochon, and G. Hadziiloannou, Proc. SPIE, 6153 (2006) 61530P.
- (2006) Proc. SPIE , vol.6153
- May, M.J.¹ Mortini, B.² Sourd, C.³ Perret, D.⁴ Chung, D.W.⁵ Barclay, G.⁶ Brochon, C.⁷ Hadziiloannou, G.⁸

5
- 3142654227
- T. Ogata, S. Matsumaru, H. Shimizu, N. Kubota, H. Hada, and M. Shirai, J. Photopolym. Sci. Technol., 17 (2004) 483.
- (2004) J. Photopolym. Sci. Technol , vol.17 , pp. 483
- Ogata, T.¹ Matsumaru, S.² Shimizu, H.³ Kubota, N.⁴ Hada, H.⁵ Shirai, M.⁶

6
- 22144475459
- T. Ogata, S. Matsumaru, R. Takahashi, K. Kasai, Y. Kinoshita, H. Hada, and M. Shirai, J. Photopolym. Sci. Technol., 18 (2005) 393.
- (2005) J. Photopolym. Sci. Technol , vol.18 , pp. 393
- Ogata, T.¹ Matsumaru, S.² Takahashi, R.³ Kasai, K.⁴ Kinoshita, Y.⁵ Hada, H.⁶ Shirai, M.⁷

7
- 33745633606
- T. Ogata, Y. Kinoshita, S. Furuya, S. Matsumaru, M. Takahashi, D. Shiono, T. Dazai, H. Hada, and M. Shirai, Proc. SPIE, 6153 (2006) 615328.
- (2006) Proc. SPIE , vol.6153 , pp. 615328
- Ogata, T.¹ Kinoshita, Y.² Furuya, S.³ Matsumaru, S.⁴ Takahashi, M.⁵ Shiono, D.⁶ Dazai, T.⁷ Hada, H.⁸ Shirai, M.⁹

8
- 33745657851
- T. Ogata, S. Furuya, K. Kasai, H. Hada, and M. Shirai, Jpn. J. Appl. Phys., 45 (2006) 5450.
- (2006) Jpn. J. Appl. Phys , vol.45 , pp. 5450
- Ogata, T.¹ Furuya, S.² Kasai, K.³ Hada, H.⁴ Shirai, M.⁵

9
- 0003286167
- D. M. Grant and N. Grassie, Polymer, 1 (1960) 445.
- (1960) Polymer , vol.1 , pp. 445
- Grant, D.M.¹ Grassie, N.²

10
- 0001247956
- N, Grassie and J. R. Maccallum, J. Polymer. Sci., 2A (1964) 983.
- (1964) J. Polymer. Sci , vol.2 A , pp. 983
- Grassie, N.¹ Maccallum, J.R.²

11
- 0029521510
- M. K. Awad, Polym. Degrad. Stab. 49 (1995) 339.
- (1995) Polym. Degrad. Stab , vol.49 , pp. 339
- Awad, M.K.¹

12
- 12444342791
- E. Honkanen, T. Moisio, and P. Karvonen, Acta Chem. Scand., 19 (1965) 370.
- (1965) Acta Chem. Scand , vol.19 , pp. 370
- Honkanen, E.¹ Moisio, T.² Karvonen, P.³

13
- 0041360597
- Y. Matsui, S. Umeda, S. Seki, S. Tagawa, S. Ishikawa, and T. Itani, Jpn. J. Appl. Phys., 42 (2003) 3894.
- (2003) Jpn. J. Appl. Phys , vol.42 , pp. 3894
- Matsui, Y.¹ Umeda, S.² Seki, S.³ Tagawa, S.⁴ Ishikawa, S.⁵ Itani, T.⁶

14
- 84985535021
- H. Schwarz, M. T. Reetz, W. F. Maier, C. Wesdemiotis, I. Chatziiosifidis, and M. Schilling, Angew. Chem. Int. Ed. Engl., 18 (1979) 952.
- (1979) Angew. Chem. Int. Ed. Engl , vol.18 , pp. 952
- Schwarz, H.¹ Reetz, M.T.² Maier, W.F.³ Wesdemiotis, C.⁴ Chatziiosifidis, I.⁵ Schilling, M.⁶

15
- 0342526293
- G. Geuskens, E. Hellinckx, and C. David, Eur. Polym. J., 7 (1971) 561.
- (1971) Eur. Polym. J , vol.7 , pp. 561
- Geuskens, G.¹ Hellinckx, E.² David, C.³

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