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Volumn 53, Issue 6, 2006, Pages 3667-3674

New partition factor calculations for evaluating the damage of low energy ions in silicon

Author keywords

Electronic losses; Monte Carlo calculations; NIEL; Partition factor

Indexed keywords

LINDHARD'S CALCULATIONS; NON-IONIZING ENERGY LOSSES (NIEL); PARTITION FACTOR;

EID: 33846286801     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNS.2006.884382     Document Type: Conference Paper
Times cited : (40)

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