Recommended practice for process sampling for partial pressure analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 1, 2007, Pages 167-186

  Blessing, James E ^a   Ellefson, Robert E ^b   Raby, Bruce A ^c   Brucker, Gerardo A ^a   Waits, Robert K ^c  

^a MKS Instruments   (United States)

^b In Situ Analysis Group   (United States)

^c Brooks Automation Inc ^*

Author keywords

[No Author keywords available]

Indexed keywords

GAS ATMOSPHERES; PARTIAL PRESSURE ANALYSIS; PROCESS GASES;

MASS SPECTROMETERS; PROCESS CONTROL; SAMPLING; VACUUM TECHNOLOGY;

PARTIAL PRESSURE;

EID: 33846247132     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2364001     Document Type: Article

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