Method for calculation of gas flow in the whole pressure regime through ducts of any length

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1674-1678

  Livesey, R G ^a  

^a BOC Edwards   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0347424151     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.1345895     Document Type: Conference Paper

References (12)

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