Atmospheric pressure sample inlet for mass spectrometers

Review of Scientific Instruments

Volumn 71, Issue 12, 2000, Pages 4655-4657

  Dheandhanoo, Seksan ^a   Ciotti, Ralph J ^a   Ketkar, Suhas N ^a  

^a AIR PRODUCTS AND CHEMICALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0042182328     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1327304     Document Type: Article

References (5)

1. R. G. Ridgeway, J. G. Langan, A. D. Johnson, S. A. Rogers, and P. J. Maroulis, Proceedings of SEMICON Taiwan, September 1997.
2. R. G. Ridgeway, P. J. Maroulis, and R. V. Pearce, Proceedings of the 42nd Annual IES Technical Conference, Orlando, May 1996.
3. S. Y. Lynn, Proceedings of SEMICON West, San Francisco, July 1993.
4. Vacuum Technology, Pfeiffer Vacuum catalog (1999).
5. Analytical Technologies, Microcontamination (Aug. 1994), p. 2.