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Volumn 22, Issue 6, 2006, Pages 807-810

Electrical properties of sputter-deposited ZrO2-based Pt/ZrO2/Si capacitors

Author keywords

Gate dielectrics; Magnetron sputtering; Radio frequency; ZrO2

Indexed keywords

CAPACITANCE; ELECTRIC PROPERTIES; MAGNETRON SPUTTERING; SANDWICH STRUCTURES; SURFACE ROUGHNESS; ZIRCONIA;

EID: 33846148707     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (11)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.