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Volumn 22, Issue 6, 2006, Pages 807-810
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Electrical properties of sputter-deposited ZrO2-based Pt/ZrO2/Si capacitors
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Author keywords
Gate dielectrics; Magnetron sputtering; Radio frequency; ZrO2
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Indexed keywords
CAPACITANCE;
ELECTRIC PROPERTIES;
MAGNETRON SPUTTERING;
SANDWICH STRUCTURES;
SURFACE ROUGHNESS;
ZIRCONIA;
GATE DIELECTRICS;
RADIO FREQUECY;
CAPACITORS;
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EID: 33846148707
PISSN: 10050302
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (11)
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References (11)
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