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Journal of Applied Physics

Volumn 100, Issue 12, 2006, Pages

Ion beam generation from sheath field of grid electrode and its application to surface treatment

(5) Cho, Yong Sung a Lee, Hae June b Park, Chung Hoo b Lee, Ho Jun b Lee, Sung Kwan c

a Korea Electrotechnology Research Institute (KERI) (South Korea)

b Pusan National University (South Korea)

c Korea Automation Co Ltd (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; INSULATING MATERIALS; ION BEAMS; ION IMPLANTATION; PLASMA SHEATHS; SURFACE TREATMENT;

CONDUCTING GRID; GRID ELECTRODES; ION BEAM GENERATION; SHEATH DYNAMICS;

ELECTROCHEMICAL ELECTRODES;

EID: 33846110871 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.2400390 Document Type: Article

Times cited : (11)

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