Implementation of microfluidic devices at a transparency

Journal of Micromechanics and Microengineering

Volumn 16, Issue 12, 2006, Pages 2639-2645

  Li, Biao ^a   Schwarz, Thomas ^a   Sharon, Andre ^a  

^a Fraunhofer USA Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; LASER ABLATION; PUMPING (LASER); TRANSPARENCY; VISCOELASTICITY;

MICROFLUIDIC DEVICES; PHOTOCOPY TRANSPARENCY FILMS; SCANNING LASER MANUFACTURING TECHNIQUE; VAPOR LOSS CHARACTERISTICS;

FLUIDICS;

EID: 33846072476     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/12/017     Document Type: Article

References (28)

1. Walt D 2005 Miniature analytical methods for medical diagnostics Science 308 217
2. Sia S and Whitesides G 2003 Microfluidic devices fabricated in poly(dimethylsiloxane) for biological studies Electrophoresis 24 3563
3. Unger M A, Chou H-P, Thorsen T, Scherer A and Quake S R 2000 Monolithic microfabricated valves and pumps by multilayer soft lithography Science 288 113
4. Grover W, Ivester R, Jensen E and Mathies R 2006 Development and multiplexed control of latching pneumatic valves using microfluidic logical structures Lab. Chip 6 623
5. Nguyen N, Huang X and Chuan T 2002 NENS-micropumps: a review Trans. ASME 124 384
6. Darhuber A and Troian S 2005 Principles of microfluidic actuation by modulation of surface stresses Annu. Rev. Fluid Mech. 37 425-55
7. Merkel T C, Bondar V I, Nagai K, Freeman B D and Pinnau I 2000 Gas sorption, diffusion, and permeation in poly(dimethylsiloxane) J. Polym. Sci. B 38 415
8. Watson J M and Baron M G 1996 The behaviour of water in poly(dimethylsiloxane) J. Membr. Sci. 110 47
9. VanLandingham M R, Villarrubia J S, Guthrie W F and Meyers G F 2001 Nanoindentation of polymers: an overview Macromol. Symp. 167 15-43
10. Prakash A, Adamia S, Sieben V, Pilarski P, Pilarski L M and Backhouse C J 2006 Small volume PCR in PDMS biochips with integrated fluid control and vapour barrier Sensors Actuators B 113 398
11. Shin Y S, Cho K, Lim S H, Chung S, Park S J, Chung C, Han D C and Chang J K 2003 PDMS-based micro PCR chip with parylene coating J. Micromech. Microeng. 13 768
12. http://www.precision.com/resources/MSDS/3m_material_safety_data_sheets_i . htm
13. McDonald J C, Chabinyc M L, Metallo S J, Anderson J R, Stroock A D and Whitesides G M 2002 Prototyping of microfluidic devices in poly(dimethylsiloxane) using solid-object printing Anal. Chem. 74 1537
14. Tan A M, Rodgers K, Murrihy J P, O'Mathuna C and Glennon J D 2001 Rapid fabrication of microfluidic devices in poly(dimethylsiloxane) by photocopying Lab. Chip 1 7
15. Li C, Yang J, Tzang C, Zhao J and Yang M 2006 Using thermally printed transparency as photomasks to generate microfluidic structures in PDMS material Sensors Actuators A 126 463
16. Li B, Yu H, Sharon A and Zhang X 2004 Rapid three-dimensional manufacturing of microfluidic structures using a scanning laser system Appl. Phys. Lett. 85 2426
17. http://www.dimatix.com/
18. Metz S, Holzer R and Renaud P 2001 Polyimide-based microfluidic devices Lab. Chip 1 29
19. Cao Z, Zhang T and Zhang X 2005 Microbridge testing of plasma-enhanced chemical-vapor deposited silicon oxide films on silicon wafers J. Appl. Phys. 97 104909
20. Grover W, Skelley A, Liu C, Lagally E and Mathies R 2003 Monolithic membrane valves and diaphragm pumps for practical large-scale integration into glass microfluidic devices Sensors Actuators B 89 315
21. Teymoori M and Abbaspour-Sani E 2005 Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications Sensors Actuators A 117 222
22. Jeong O, Park S, Yang S and Pak J 2006 Fabrication of a peristaltic PDMS micropump Sensors Actuators A 123 453
23. Li B, Gueit A and Sharon A 2006 Thickness management in 3D laser manufacturing of suspended structures in a single SU-8 layer Rev. Sci. Instrum. 77 065103
24. http://www.spectraphysics.com/
25. Ho S, Balooch M, Goodis H, Marshall G and Marshall S 2004 Ultrastructure and nanomechanical properties of cementum dentin junction J. Biomed. Mater. Res. A 68 343
26. McFarland A and Colton J 2005 Role of material microstructure in plate stiffness with relevance to microcantilever sensors J. Micromech. Microeng. 15 1060
27. Lam D, Yang F, Chong A, Wang J and Tong P 2003 Experiments and theory in strain gradient elasticity J. Mech. Phys. Solids 51 1477
28. www.matweb.com