Temperature response of 1313 atoms in amorphized 6H-SiC

Applied Physics Letters

Volumn 89, Issue 26, 2006, Pages

  Jiang, W ^a   Zhang, Y ^a   Shutthanandan, V ^a   Thevuthasan, S ^a   Weber, W J ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; CARBON; DIFFUSION; HIGH TEMPERATURE OPERATIONS; ION IMPLANTATION; THERMAL EFFECTS;

IMPLANTS; TEMPERATURE RESPONSE;

SILICON CARBIDE;

EID: 33846062158     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2422892     Document Type: Article

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