Thermal stability of Ru gate electrode on HfSiO dielectric

Materials Research Society Symposium Proceedings

Volumn 917, Issue , 2006, Pages 43-48

  Frohlich, Karol ^a   Espinos, Juan Pedro ^b   Vincze, Andrej ^c   Tapajna, Milan ^a,d   Husekova, Kristina ^a  

^a INSTITUTE OF CHEMISTRY   (Slovakia)

^b INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^c INTERNATIONAL LASER CENTER   (Slovakia)

^d SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; DIELECTRIC FILMS; HAFNIUM COMPOUNDS; HEAT TREATMENT; SECONDARY ION MASS SPECTROMETRY; THERMODYNAMIC STABILITY;

CAPACITANCE-VOLTAGE MEASUREMENTS; ENERGY-BAND ALIGNEMENT; GATE ELECTRODES; X-RAY PHOTOEMISSION SPECTROSCOPY;

GATE DIELECTRICS;

EID: 33846053416     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0917-e05-02     Document Type: Conference Paper

References (10)

1. E. J. Jelenkovic and K. Y. Tong, J. Vac. Sci. Technol. B 22, 2319 (2004).
2. H. C. Zhong, G. Heuss, V. Misra, H. F. Luan, C. H. Lee, and D. L. Kwong, Appl. Phys. Lett. 78, 1134 (2001).
3. K. J. Park, J. M. Doub, T. Gougousi, and G. N. Parsons, Appl. Phys. Lett. 86, 051903 (2005).
4. M. Tapajna, P. Pisecny, R. Luptak, K. Husekova, K. Frohlich, L. Harmatha, J. C. Hooker, F. Roozeboom, and M. Jergel, Mat. Sci. in Semicon. Proc. 7, 271 (2004).
5. Y-C. Yeo, T-J. King, and C. Hu, Appl. Phys. Lett. 92, 7266 (2002).
6. D. Shamiryan, V. Paraschiv, M. Claes, W. Boullart, in Defects in High-κ Gate Dielectric Stack, edited by E. Gusev (NATO Science Series, Springer, Netherlands, 2006), p. 331.
7. Q. Li, S. J. Wang, A. C. H. Huan, J. W. Chai, J. S. Pan and C. K. Ong, Appl. Phys. Lett. 85, 6155 (2004).
8. E. A. Kraut, R. W. Grant, J. R. Waldrop, and S. P. Kowalczyk, Phys. Rev. Lett. 44, 1620 (1980).
9. L. A. J.Garvie, P. Rez, J. R. Alvarez, P. R. Buseck, Solid State Commun. 106 (5), 303 (1998).
10. M. Houssa, V. V. Afanas'ev, A. Stesman, M. M. Heyns, Appl. Phys. Lett. 77 1885 (2000).